Open cassette wafer sorters for wafer sizes 50mm through 300mm. using industry standard robotic components for longest term reliability and supportablity. 1 to 5 stations with multiple concurrent carrier sizes are available. Top features include NADAtech's RBuilder recipe development tool and perfect wafer mapping using SUREscan thrubeam carrier scanning.
SMIF and FOUP pod wafer sorters for wafer sizes 150mm through 300mm. all systems use industry standard ports and robotics for longest term reliability and supportablity. 1 to 4 station with multiple concurrent carrier sizes are available including bridge 200mm/300mm tools. NADAtech's RBuilder recipe development tool seamlessly integrates local and remote capabilities in a single recipe.
Taking sorter automation one step further by adding inspection and metrology components. Any NADAtech sorter can have plus features added. these include: wafer bevel inspection, bright light front side inspection, bright light backside inspection, slip detection, dimple detection, wafer thickness measurement, p-type / n-type, automated backside scratch detection and soon to include wafer lattice orientation using XRD.